Carl V. Thompson
Processing and properties of thin films and nanostructures for applications
in electronic and electromechanical micro- and nano- devices and systems.
Control of stress and mechanical properties in thin films for MEMS. Interconnect
reliability. Controlled growth of systems of nanostructures.
13-5069
253-7652
cthomp@mtl.mit...
Donald E. Troxel
Applications of digital systems. Computer-aided fabrication of integrated
circuits. Computer-assisted prototyping of advanced microsystems.
Remote inspection of ICs and MEMS devices. Reliability of interconnect.
26-365
253-2570
troxel@mtl.mit...
Joel Voldman
Biological applications of microsystem technology. Engineering and use
of microsystems for analysis and engineering of single cells. Physical
and electrical cell manipulation. Design, modeling, microfabrication,
and testing of microfluidic biological devices employing unconventional
materials and fabrication processes. Electromechanics at the microscale.
36-824
253-2094
voldman@mit...
Ian A. Waitz
Micro gas turbine engines, micro-combustion systems, MEMS igniters and
temperature sensors, propulsion, fluid mechanics, thermodynamics,
reacting flows, and aeroacoustics.
31-207
253-0218
iaw@mit...
Brian L. Wardle
Nano-engineered composites, MEMS
Power devices and energy harvesting, advanced composite materials
and systems, structural health monitoring (SHM), fracture, fatigue
and damage mechanics, durability modeling/testing, finite-element
modeling,; structural response and testing, buckling mechanics, project
design and management, business strategy and growth, cost modeling.
33-314
252-1539
wardle@mit...


